Effects of acetylene/ammonia mixtures on the properties of carbon films prepared by thermal chemical vapor deposition
Year: 2012
Type: article
Source: Surface and Coatings Technology
Authors: Liang-Hsun Lai, Sham-Tsong Shiue
Institution: National Chung Hsing University
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Award: G3286953964
OpenAlex ID: W2015225311