Work

Large Area Photonic Crystal Slabs for Visible Light with Waveguiding Defect Structures: Fabrication with Focused Ion Beam Assisted Laser Interference Lithography

Year: 2001

Type: article

Abstract: Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4–air photonic crystal with a light-guiding defect line running along the center of the slab (total length = 1 mm).

Source: Advanced Materials

DOI: 10.1002/1521-4095(200110)13:20<1551::aid-adma1551>3.0.co;2-v

Authors: L. Vogelaar, W. Nijdam, H. A. G. M. van Wolferen, R. M. de Ridder, F. B. Segerink, E. Flück, L. Kuipers, N. F. van Hulst

Institutions: University of Twente, Aquamarijn (Netherlands)

Language: English

Topic: Photonic Crystals and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

Funders: Stichting voor Fundamenteel Onderzoek der Materie, University of Twente, Nederlandse Organisatie voor Wetenschappelijk Onderzoek

OpenAlex ID: W2015352252

FWCI: 2.813

Cites: 1

Cited by: 89

Related to: 10