Process-parameter optimization of Sb 2 O 3 films in the ultraviolet and visible region for interferometric applications
Year: 1996
Type: article
Source: Applied Physics A
DOI: 10.1007/bf01567650
Authors: N. K. Sahoo, K. V. S. R. Apparao
Institution: Bhabha Atomic Research Centre
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2015366198