Work

Characterization of ITO etching by spontaneously evaporated fume of hydrogen chloride

Year: 2012

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2012.09.021

Authors: Sewook Oh, Hunsang Jung, Yo-Han Kim, Minkeun Kim, Eunji Yoo, Young Jin Choi, Tae-Sik Yoon, Hyun Ho Lee

Institution: Myongji University

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2015403206

FWCI: 0.6

Cites: 8

Cited by: 13

Related to: 10