Work

Helical Nanoholes Bored in Silicon by Wet Chemical Etching Using Platinum Nanoparticles as Catalyst

Year: 2005

Type: article

Source: Electrochemical and Solid-State Letters

DOI: 10.1149/1.2109347

Authors: Kazuya Tsujino, Michio Matsumura

Institutions: Research Center for Solar Energy Chemistry, Graduate School of Engineering Science, Osaka University, The University of Osaka

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2015488136

FWCI: 4.567

Cites: 24

Cited by: 141

Related to: 10