Work

Simulation aspects of a thermal accelerometer

Year: 1996

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(96)01241-1

Authors: U.A. Dauderstädt, P.H.S. de Vries, R. Hiratsuka, J.G. Korvink, P.M. Sarro, H. Baltes, S. Middelhoek

Institutions: Delft University of Technology, Nippon Steel (Japan), ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2015491391

FWCI: 1.455

Cites: 4

Cited by: 18

Related to: 10