Various replication techniques for manufacturing three-dimensional metal microstructures
Year: 1997
Type: article
Source: Microsystem Technologies
Authors: R. Ruprecht, T. Benzler, T. Hanemann, K. Müller, J. Konys, V. Piotter, G. Schanz, L. Schmidt, A. Thies, H. Wöllmer, J. Haußelt
Institution: Karlsruhe Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2015791525