Micromachined coplanar waveguides in CMOS technology
Year: 1996
Type: article
DOI: 10.1109/75.536952
Authors: V. Milanovic, M. Gaitan, E.D. Bowen, M.E. Zaghloul
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2015959998
