Work

Origin of the defects observed after laser annealing of implanted silicon

Year: 1981

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.92646

Authors: A. Mesli, J. C. Muller, D. Salles, P. Siffert

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016079684

FWCI: 3.446

Cites: 4

Cited by: 21

Related to: 10