Work

The use of secondary ionic emission and nuclear reactions to determine the parameters in the manufacture of a planar transistor

Year: 1972

Type: article

Source: Journal of Radioanalytical and Nuclear Chemistry

DOI: 10.1007/bf02521001

Authors: J. Monnier, H. Hilleret, E. Ligeon, J. B. Quoirin

Institution: Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016126135

FWCI: 0.865

Cites: 8

Cited by: 3

Related to: 10