Control of microelectromechanical systems membrane curvature by silicon ion implantation
Year: 2003
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.1611639
Authors: S. Jin, H. Mavoori, J. Kim, V. A. Aksyuk
Institutions: University of California San Diego, Hawaii Pacific University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2016126739