Work

Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units

Year: 2008

Type: article

Abstract: We have characterized the ion energy distribution in argon plasmas sustained by multiple internal antenna units as a function of Ar pressure. The distribution has been measured using an ion energy analyzer with a mass separator. The peak of ion energy distribution depended more strongly on pressure and corresponded to the magnitude of plasma potential. The full width at half maximum of the distributions decreased with decreasing antenna RF voltage caused by a decrease in Ar pressure.

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.47.6900

Authors: Kosuke Takenaka, Yuichi Setsuhara, Kazuaki Nishisaka, Akinori Ebe

Institutions: Joining and Welding Research Institute, The University of Osaka, EMD Corporation (Japan)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funder: Ministry of Education, Culture, Sports, Science and Technology

OpenAlex ID: W2016164591

FWCI: 4.104

Cites: 19

Cited by: 40

Related to: 10