Work

Novel noncontact thickness metrology for backend manufacturing of wide bandgap light emitting devices

Year: 2005

Type: article

Source: Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics

DOI: 10.1002/pssc.200460606

Authors: Wojtek J. Walecki, Kevin Lai, Vitalij Souchkov, Phuc Van, SH Lau, Ann Koo

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016199788

FWCI: 0.667

Cites:

Cited by: 15

Related to: 10