Work

A wide-range metrology AFM and its applications

Year: 2005

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.576240

Authors: Xiaofeng Lin, Haijun Zhang, Dongxian Zhang

Institution: Zhejiang University

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016253141

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