Maskless patterning of indium tin oxide layer for flat panel displays by diode-pumped Nd:YLF laser irradiation
Year: 1994
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.111980
Authors: M. Takai, D. Bollmann, K. Haberger
Institutions: The University of Osaka, Fraunhofer-Gesellschaft
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2016346050