Work

Exploring the sources of MEEF in contact SRAMs

Year: 2007

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.746801

Authors: Emily Gallagher, Ian Stobert, Masaru Higuchi, Donald Samuels

Institutions: IBM (United States), Toppan (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: International Business Machines Corporation

OpenAlex ID: W2016415500

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