Work

Optical improvement of photonic devices fabricated by Ga+ focused ion beam micromachining

Year: 2007

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.2770741

Authors: Hai-Hua Tao, Cheng Ren, Shuai Feng, Ya-Zhao Liu, Zhi-Yuan Li, Bing-Ying Cheng, Dao-Zhong Zhang, Ai-Zi Jin

Institutions: Chinese Academy of Sciences, Institute of Physics

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W2016436626

FWCI:

Cites: 26

Cited by: 8

Related to: 10