Work

Filling of very deep, wide trenches by BenzoCycloButene polymer

Year: 2009

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-009-0894-2

Authors: Hicham Eldin Mahfoz Kotb, K. Isoird, F. Morancho, L. Théolier, T. Do Conto

Institutions: Centre National de la Recherche Scientifique, Université Toulouse III - Paul Sabatier, Laboratoire d'Analyse et d'Architecture des Systèmes, Université de Toulouse

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Dow Chemical Company

OpenAlex ID: W2016497304

FWCI: 1.085

Cites: 23

Cited by: 19

Related to: 10