Work

The sputtering of oxides part i: a survey of the experimental results

Year: 1973

Type: article

Source: Radiation Effects

DOI: 10.1080/00337577308232213

Authors: Roger Kelly, Nghi Q. Lam

Institutions: McMaster University, Argonne National Laboratory

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016711535

FWCI: 9.17

Cites: 46

Cited by: 218

Related to: 10