Plasma-enhanced metalorganic chemical vapor deposition of c-axis oriented and epitaxial films of ZnO at low substrate temperatures
Year: 1981
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.92751
Authors: Tadashi Shiosaki, Takashi Yamamoto, Mitsuo Yagi, Akira Kawabata
Institution: Kyoto University
Language: English
Topic: ZnO doping and properties
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2016940565