Work

Improvement of n-Type Poly-Si Film Properties by Solid Phase Crystallization Method

Year: 1993

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.32.3720

Authors: Takao Matsuyama, Makoto Tanaka, Shinya Tsuda, Shoichi Nakano Shoichi Nakano, Yukinori Kuwano Yukinori Kuwano

Institution: Sanyo (Japan)

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2016941332

FWCI: 5.767

Cites: 7

Cited by: 66

Related to: 10