Year: 2005
Type: article
Abstract: Three-axis accelerometers based on four separate seismic masses, each one suspended on a slanted beam, have previously been shown to have identical resolution and frequency responses in all directions. Here, a new and in-depth model of such accelerometers is presented. The theoretical model incorporates non-ideal effects such as the finite aspect ratio of the beam and the frequency-dependent squeezed gas-film damping. Sensitivity, resolution, transverse sensitivity and process errors are discussed. Prototype devices have been fabricated in a straightforward silicon process.
Authors: Henrik Rödjegård, Gert I Andersson, Cristina Rusu, Mikael Löfgren, Dag Billger
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2017111932