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EUV and soft x-ray multilayer optics

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Year: 2004
Type: conference-paper
Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
DOI: 10.1117/12.512502
Authors: Norbert Kaiser, Sergiy Yulin, Torsten Feigl, Helmut Bernitzki, Hans Lauth
Institutions: Fraunhofer Institute for Applied Optics and Precision Engineering, Jenoptik (Germany)
Language: English

Topic: Advanced X-ray Imaging Techniques
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences

Open Access status: closed
OpenAlex ID: W2017193490
FWCI: 2.081
Cites:
Cited by: 10
Related to: 10
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