Work

Large Crystals on Cu Film Surfaces Irradiated by a Glow Discharge Plasma

Year: 1998

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.37.4510

Authors: Teruo Katsumata, Masaki Konno, Hiroyuki Murakami

Institution: Otsuma Women's University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2017358312

FWCI:

Cites: 7

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Related to: 10