Work

Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria

Year: 2002

Type: article

Source: Journal of materials research/Pratt's guide to venture capital sources

DOI: 10.1557/jmr.2002.0396

Authors: Seung-Ho Lee, Zhenyu Lu, S. V. Babu, Egon Matijević

Institution: Clarkson University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Intel Corporation, Korea Institute of Ceramic Engineering and Technology

OpenAlex ID: W2017359036

FWCI: 10.32

Cites: 11

Cited by: 122

Related to: 10