Work

Effects of radio-frequency power on the properties of carbon thin films prepared by thermal chemical vapor deposition enhanced with remote inductively-coupled-plasma using acetylene/nitrogen mixtures

Year: 2014

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2014.02.108

Authors: Liang-Hsun Lai, Kuan-Chang Wu, Sham-Tsong Shiue

Institution: National Chung Hsing University

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Education, National Science Council

Award: G8292003418

OpenAlex ID: W2017389588

FWCI:

Cites: 47

Cited by: 1

Related to: 10