Work

A reactive ion etch study for producing patterned platinum structures

Year: 1997

Type: article

Source: Integrated ferroelectrics

DOI: 10.1080/10584589708013034

Authors: Curtis E. Farrell, K. R. Milkove, Cindy Wang, David E. Kotecki

Institutions: IBM (United States), IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2017509656

FWCI: 5.529

Cites: 9

Cited by: 24

Related to: 10