Modeling of dopant diffusion during rapid thermal annealing
Year: 1986
Type: article
DOI: 10.1116/1.573758
Author: Richard B. Fair
Institutions: Duke University, MCNC Research and Development Institute
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2017560421