Work

Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining

Year: 2006

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.647154

Authors: Bhargav S. Citla, Sriram Venkataraman, Janusz Murakowski, Garrett J. Schneider, Dennis W. Prather

Institution: University of Delaware

Language: English

Topic: Photonic Crystals and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2017640293

FWCI: 1.392

Cites:

Cited by: 1

Related to: 10