InGaAs tri-gate MOSFETs with MOVPE regrown source/drain
Year: 2014
Type: conference-paper
Source: Conference digest
Authors: Yuichi Mishima, Toru Kanazawa, Haruki Kinoshita, Eiji Uehara, Yasuyuki Miyamoto
Institution: Tokyo Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2018018428
