E–H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas
Year: 2011
Type: article
Source: Current Applied Physics
Authors: Jung-Kyu Lee, Hyo-Chang Lee, Chin-Wook Chung
Institution: Hanyang University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2018116785