Scaleable stagnation-flow reactors for uniform materials deposition: Application to combustion synthesis of diamond
Year: 1993
Type: article
Abstract: We describe two inherently scaleable geometries for chemical-vapor-deposition and heat-transfer processes that are based on stagnation flows. The ‘‘coflow’’ and ‘‘trumpet-bell’’ designs result in radially uniform fluxes to surfaces and they optimize the use of reagents. Using a trumpet-bell burner, we have grown uniform films of diamond from a substrate-stabilized flat flame of C2H2/H2/O2.
Source: Applied Physics Letters
DOI: 10.1063/1.109668
Authors: K. F. McCarty, E. Meeks, R. J. Kee, A. E. Lutz
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2018132489
