Fabrication of silicon nanowire structures based on proximity effects of electron-beam lithography
Year: 2004
Type: article
Source: Solid State Communications
Authors: S.F. Hu, W.C. Weng, Y.M. Wan
Institution: I-Shou University
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Council
OpenAlex ID: W2018182802
