The emission of neutral clusters in sputtering
Year: 1989
Type: article
Source: Applied Physics A
DOI: 10.1007/bf00619396
Authors: H. Gnaser, W. O. Hofer
Institutions: University of Kaiserslautern, Forschungszentrum Jülich
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2018235196