Work

Results on the reliability of silicon micromachined structures for semiconductor gas sensors

Year: 2001

Type: article

Source: Sensors and Actuators B Chemical

DOI: 10.1016/s0925-4005(01)00706-7

Authors: I Gràcia, J Santander, C Cané, M.C Horrillo, I Sayago, J Gutierrez

Institutions: Consejo Superior de Investigaciones Científicas, Centro Nacional de Microelectrónica

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2018301381

FWCI: 3.156

Cites: 9

Cited by: 32

Related to: 10