Work

Fabrication of optical waveguides by ion‐beam sputtering

Year: 1976

Type: article

Source: Journal of Vacuum Science and Technology

DOI: 10.1116/1.568872

Authors: W. D. Westwood, S. J. Ingrey

Institution: Bell (Canada)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2018353394

FWCI: 1.124

Cites:

Cited by: 14

Related to: 10