High-quality AlN layers grown by hot-wall MOCVD at reduced temperatures
Year: 2011
Type: article
Source: Journal of Crystal Growth
Authors: A. Kakanakova-Georgieva, D. Nilsson, E. Janzén
Institution: Linköping University
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W2018371027