Work

Growth of epitaxial TiN films on MgO(100) by high current discharge plasma

Year: 1992

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.351915

Authors: S. Miyagawa, K. Saitoh, H. Niwa, M. Ikeyama, G. Massouras, Y. Miyagawa

Institution: Nagoya Industrial Science Research Institute

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2018590830

FWCI: 1.327

Cites: 14

Cited by: 11

Related to: 10