Work

Chemistry of polymer molecules for ultrathin films

Year: 1987

Type: article

Source: Thin Solid Films

DOI: 10.1016/0040-6090(87)90412-3

Author: P. Le Barny

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2018893025

FWCI: 3.519

Cites: 72

Cited by: 16

Related to: 10