Work

The deposition of aluminium oxide coatings by reactive unbalanced magnetron sputtering

Year: 1996

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/s0257-8972(96)02997-0

Authors: P.J. Kelly, O.A. Abu-Zeid, R.D. Arnell, J. Tong

Institutions: University of Salford, United Arab Emirates University, Jilin University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2018917661

FWCI: 2.512

Cites: 13

Cited by: 82

Related to: 10