Work

Design and process impact on thin-film interconnection performance

Year: 1991

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.25514

Authors: Glenn A. Rinne, Lih-Tyng Hwang, Gretchen M. Adema, Donald A. King, Iwona Turlik

Institution: MCNC Research and Development Institute

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2019019598

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