Work

Synthesis of carbon nitride films by magnetically rotated arc-plasma jet chemical vapor deposition

Year: 1995

Type: article

Source: Solid State Communications

DOI: 10.1016/0038-1098(95)00275-8

Authors: Tyan-Ywan Yen, Chang-Pin Chou

Institution: National Yang Ming Chiao Tung University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2019129402

FWCI: 16.48

Cites: 30

Cited by: 63

Related to: 10