Work

Hydrogen Passivation of Polysilicon Thin-Film Transistors by Electron Cyclotron Resonance Plasma

Year: 1993

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.32.2601

Authors: Kris Baert, Hiroyuki Murai, Kazuhiro Kobayashi, Hirofumi Namizaki Hirofumi Namizaki, Masahiro Nunoshita Masahiro Nunoshita

Institution: Mitsubishi Electric (Japan)

Language: English

Topic: Thin-Film Transistor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2019166133

FWCI: 4.45

Cites: 14

Cited by: 31

Related to: 10