Work

Synthesis and Characterization of (.beta.-Diketonate)(7-tert-butoxynorbornadiene)copper(I) Compounds, a Series of New Copper CVD Precursors

Year: 1995

Type: article

Source: Organometallics

DOI: 10.1021/om00006a009

Authors: Kai-Ming Chi, Hung-Chang Hou, Pao-Ts'un Hung, Shie-Ming Peng, Gene-Hsiang Lee

Institutions: National Chung Cheng University, National Taiwan University

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Council, Academia Sinica, National Cheng Kung University

OpenAlex ID: W2019796373

FWCI: 1.489

Cites:

Cited by: 22

Related to: 10