Year: 2008
Type: article
Abstract: This paper develops a humped spiral antenna of top inductively coupled plasma with variable gap. Comparing with planar spiral antennae, it investigates the performance of humped spiral antennae in the calculated electromagnetic configurations and experimental results. It finds that the humped antenna has the improved uniformity of plasma density in the radial direction and the decreased electron temperature in the top inductively coupled plasma. By experimental and theoretical analyses, the plasma performance in the case of humped antennae is considered to be the combined results of the uniform electromagnetic configurations and the depressed capacitively coupling effect.
Source: Chinese Physics B
Authors: Xu Xu, Li Lin-Sen, Liu Feng, Zhou Qian-Hong, Liang Rong-Qing
Institution: Fudan University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
Award: 脉冲等离子体推进器的等离子体特性研究
OpenAlex ID: W2019832003