Work

Variations in the properties of an implantation-synthesized SixNy-Si heterosystem as a result of thermal and ion-beam treatments

Year: 2002

Type: article

Source: Semiconductors

DOI: 10.1134/1.1507278

Authors: V. V. Karzanov, K. A. Markov, V. V. Sdobnyakov, E. S. Demidov

Institution: N. I. Lobachevsky State University of Nizhny Novgorod

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2019867189

FWCI:

Cites: 2

Cited by: 1

Related to: 10