Work

Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance

Year: 1999

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(99)00534-9

Authors: M. Alvisi, S. Scaglione, S. Martelli, A. Rizzo, L. Vasanelli

Institutions: University of Salento, National Agency for New Technologies, Energy and Sustainable Economic Development, ENEA Casaccia Research Centre, ENEA Frascati Research Centre

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2020207259

FWCI: 6.754

Cites: 12

Cited by: 85

Related to: 10