Work

High rate deposition of diamond-like carbon films by sheet-like plasma chemical vapor deposition

Year: 1999

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.581693

Authors: Ryozo Nonogaki, Suzuya Yamada, Tsutomu Araki, Tetsuya Wada

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2020583876

FWCI: 1.099

Cites: 7

Cited by: 8

Related to: 10