Work

Process techniques for improving performance of positive tone silylation

Year: 1993

Type: article

Source: Optical Engineering

DOI: 10.1117/12.146858

Authors: Edward K. Pavelchek, Gary S. Calabrese, John F. Bohland, Bruce W. Dudley, Susan K. Jones, Peter W. Freeman

Institution: MCNC Research and Development Institute

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2020939655

FWCI: 1.483

Cites:

Cited by: 4

Related to: 10