Work

Realization and performance of thin SiO2/SiNx membrane for microheater applications

Year: 1998

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(97)01627-0

Authors: Carole Rossi, Pierre Temple-Boyer, Daniel Estève

Institutions: Centre National de la Recherche Scientifique, Laboratoire d'Analyse et d'Architecture des Systèmes

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2020984192

FWCI: 6.149

Cites: 15

Cited by: 123

Related to: 10